Del Mar Photonics NSOM applications

Fabrication and integration of VLSI micro/nano-photonic circuit board

Near field scanning optical microscopy (NSOM) can be used in the design, fabrication and integration of a newly proposed modular system  “optical printed circuit board (O-PCB).” The O-PCB is designed to provide micro/nano-scale optical waveguides to perform the functions of transporting, switching, routing and distributing optical signals on flat modular boards or substrates that can lead to a platform for VLSI micro/nano-photonic integration.

Near-field scanning optical microscopy (NSOM) for optical characterization of micro/nano-scale photonic devices and also examine the effect of the waveguide surface roughness on the transmission characteristics of the waveguides.
 

Near-field Scanning Optical Microscope (NSOM) is a versatile tool for nano-characterization and nanomanufacturing.
Conventional microscopes have fundamentally limited resolution due to diffraction, but there is no such restriction for near-field interactions, that is why near-field microscopy is becoming one of the most important techniques for nano-science.
Possible applications of this tool are characterization of photonic nanodevices, bio photonics (investigation of cells, viruses, DNA molecules), nano-chemistry (chemical reactions control), nanoscale photolithography (processing of photosensitive polymers). NSOM delivered femto-second pulses can be used for nanometer-scale surface topology modification. Temporal resolution provided by femtosecond laser opens wide range of new possibilities such as: transport dynamics studies of nanostructured materials, pump-probe experiments, ultra fast coherent and Raman spectroscopy. Spatial optical resolution of the tool is better than 100 nm and temporal resolution in the pulse operation mode is better than 100 fs. Tunable CW operation for spectral measurements is also available, wavelength range in this case is 710-950 nm.
Advanced Nearfield Scanning Optical Microscopy/Atomic Force Microscopy/Scanning Probe Microscopy systems (NSOM-AFM-SPM) are used for numerous applications in materials research, including semiconductors, data storage, electronic materials, solar cells, polymers, catalysts, life sciences and nano-sciences. NSOM-AFM-SPM is a well-established method for ultra-high nano-scale spatial resolution surface imaging and the characterization of surfaces and interfaces down to atomic dimensions.

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Keywords: Optical interconnection; Photonic integration; Microphotonics; Nanophotonics; Micro-fabrication; Nano-fabrication; Photonic crystals

1. Introduction
2. Design of O-PCB for VLSI photonic circuits
3. Scaling rules for miniaturization and integration of VLSI waveguide circuits
4. Fabrication of polymer waveguides and circuits
5. Measurement of propagation characteristics using NSOM
6. Minimizing scattering losses incurred by waveguide wall surface
7. Nano-scale photonic crystal beam splitter devices for VLSI circuits
8. Nano-scale plasmonic devices for VLSI circuits
9. Assembly of optical circuit board
10. Summary and conclusion