Excimer laser Deep Sea 7050 (pdf)
Metal-ceramic discharge chamber
Laser head with power supply and energy monitor
Oil free vacuum pump
Gas filter
Gas tubes
Gas regulator (for XeCl premix)
Software
Manual
Specification:
Wavelength: 308 nm (XeCl)
Max. Pulse Energy: 200 mJ
Max. Repetition Rate: 50 Hz
Max. Average Power: 5 W
Pulse Duration: 20-25 ns (FWHM)
Pulse-to-Pulse Stability: σ< 2 % (standard deviation)
Beam Divergence: 1.5 mrad x 4.5 mrad (FWHM)
Beam Size:7 x 20 mm
Electrical Power: 380/220 V, 50-60 Hz, 3 phases
Cooling System: water
Gas Input System: Premix gas (XeCl)
Dimensions (LxHxW) 1360 mm x 382 mm x 720 mm
Warranty - 1 year or 100 millions pulses whichever comes first
New: Del Mar Photonics developed femtosecond excimer laser based on combination of femtosecond seed oscillator and Deep Sea excimer laser technology
Cortes-K Femtosecond Seed Laser
for Petawatt KrF Excimer Laser